Warm Startup with the Leybolds

This is for when the compressor is filled with the gas to be used.

Notes

• Pumps turning off, especially the Leybolds.
• The compressor shutting off.
• NVloop gets very sensitive as it closes. It may not seem to be doing anything, but may change Pinlet and Pdischarge a lot around the last 1/4 of the thread.

Evacuate Pumps and Chamber

1. Turn the chiller on, if it is off.
2. Turn off the swithces for pumps 1-13 on the motor control panel, if they are on.
3. Turn on the Leybold control panel, if it is off.
4. Turn on the motor control panel, if it is off.
5. Connect Vair1 and Vair2 to the compressed air, if they are not connected.
6. Seal the chamber, if it is not sealed.
7. Close Vin, if it is open.
8. Close NVvent, if it is open.
9. Close NVvent2, if it is open.
10. Close Vpurge, if it is open.
11. Close Vrough, if it is open.
12. Close Vcomp_in, if it is open.
13. Open Vgate, if it is closed.
14. Turn on XDS35, if it is off.
15. Slowly open Vrough.
16. Wait until PIRch <= 10 torr.
17. Turn off Leybold 3.
18. Turn off Leybold 1-2.
19. Wait until PIR4 <= 1E-1 torr.
20. Turn on pumps 8-9.
21. Wait until PIR3 <= 1E-1 torr.
22. Turn on pumps 11-13.
23. Turn on pump 10.
24. Turn on pump 7.
25. Wait until PIRch <= 1E-2 torr.
26. Turn on Monster turbo.
27. Ensure PIRturbo <= 5E-2 torr.
28. Turn on UP1-UP4 and DN1-DN4 (if attached).
29. Turn on CCU1-CCU4 and CCD1-CCD (if attached).