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Procedure / Shutdown_Leybold

Shutdown with the Leybolds

Shutdown

  1. Reduce the gas so that Pdischarge = 150-200 psig.
  2. Close Vin.
  3. Close Vcomp_in.
  4. Open Vrough.
  5. Turn off the compressor.
  6. Turn off CCU1-CCU4 and CCD1-CCD4, if attached.
  7. Turn off UP1-UP4 and DN1-DN4, if attached.
  8. Turn off pump 7.
  9. Turn off pump 10.
  10. Turn off pumps 11-13.
  11. Turn off pumps 8-9.
  12. Turn off Leybold 1-2.
  13. Turn off Leybold 3.
  14. Wait for pumps to spin down.
  15. Close Vrough.
  16. Turn off XDS35.

Updated