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Shutdown with the Leybolds
Shutdown
- Reduce the gas so that Pdischarge = 150-200 psig.
- Close Vin.
- Close Vcomp_in.
- Open Vrough.
- Turn off the compressor.
- Turn off CCU1-CCU4 and CCD1-CCD4, if attached.
- Turn off UP1-UP4 and DN1-DN4, if attached.
- Turn off pump 7.
- Turn off pump 10.
- Turn off pumps 11-13.
- Turn off pumps 8-9.
- Turn off Leybold 1-2.
- Turn off Leybold 3.
- Wait for pumps to spin down.
- Close Vrough.
- Turn off XDS35.
Updated